Wafer inspection system, 8
Wafer Chuck: 200mm Low Contact Type
Wafer Handling Autoloader
KLA-Tencor Software Version 5.1.060
Array Mode Pixel: 0.25, 0.39, 0.62, 1.25
Random Mode Pixel: 0.25, 0.39, 0.62, (1.25 um TBD)
400 MPS Image Computer
Random Array Mode Inspection
2 Standard Cassette Plates
ADC Option
SAT Option (Segmented Auto Threshold)
Full Compatibility with KLA-Tencor Klarity Software via Directlink
SECS Compliant
XE (Xenon) Ultra Broadband Light Source
Blower Box included
CE Compliant Line Conditioner
Operations Manual Documentation
208V, 3PH, 5060Hz.