Wafer inspection system, 8Open cassetteUser interfaceMonitor with PCStages:X Stage bracketTheta stageImage computer:IMC0IMC1IMC2IMC3Power supplies:12 VDC E-Drawer24 VDC E-Drawer-24 VDC E-Drawer48 VDC E-Drawer65 VDC E-Drawer2000 vintage.